LIQUID SUPPLYING SYSTEM FOR TREATING A SUBSTRATE ANE METHOD USING THE SYSTEM

摘要

PURPOSE: A liquid supplying system for treating a substrate and a method using the system are provided to improve the separation efficiency of a rinsing liquid by forming a drying liquid separation part including first and second separation parts. CONSTITUTION: A substrate drying part (100) dries a rinsing liquid on a substrate. A drying liquid separation part (20) collects mixed liquid from the substrate drying part. The drying liquid separation part separates the drying liquid from the mixed liquid. The drying liquid separation part includes a first separation part and a second separation part. A drying liquid supply part (30) resupplies the separated drying liquid to the substrate drying part.