| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck regenerating method capable of elongating a life of a chuck body.SOLUTION: An electrostatic chuck comprises a chuck body 1 that is a dielectric body provided with a rib portion and a support portion 13 on an adsorption face to an adsorbed body, and positive and negative electrodes. In a regeneration step, a voltage is applied to both of the electrodes to electrostatically adsorb the adsorbed body on a surface. When an adsorption performance is deteriorated by repeating electrostatic adsorption of the adsorbed body, the rib portion and the support portion 13 on the adsorption face of the chuck body are removed across a predetermined thickness into a flat face, and the rib portion and the support portion are provided again. When the adsorption performance is deteriorated for the first time, instead of the regeneration step, the rib portion and a surface 13a of the support portion on the adsorption face of the chuck body are ground, so as to perform a pre-regeneration step for processing only peaks of the rib portion and the support portion into a flat plane. When the adsorption performance is deteriorated next, the above-mentioned regeneration step is performed. |
