| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device which allows the shape of an object to be accurately measured through accurate detection of the direction of radiated light.SOLUTION: A light radiation part 11 (light emitting part) radiates light. An MEMS mirror 21 (scanning part) bends the travel direction of light radiated from the light radiation part 11 and allows the light to scan a predetermined region. A light receiving element 32 (light receiver) receives the reflection of light scanned with the MEMS mirror 21. A high reflection part 51 (a first reference part) is located in the region where light is scanned with the MEMS mirror 21 so as to reflect the light scanned with the MEMS mirror 21. A low reflection part 52 (a second reference part) is located in the region where light is scanned with the MEMS mirror 21, adjacent to the high reflection part 51. The low reflection part 52 has a low reflectance to reflect the light scanned with the MEMS mirror 21 toward the direction of the light receiving element 32 compared with the high reflection part 51. |
