| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding apparatus capable of preventing breakage of a grinding wheel, a fixing means and an annular frame caused by fixation failure of the annular frame.SOLUTION: A grinding apparatus 2 grinding a workpiece 11 of a workpiece unit 13 includes: a chuck table 38 holding the workpiece 11 of the workpiece unit 13 via a pressure-sensitive adhesive sheet T; a frame fixing means comprising a support part for supporting an annular frame F to which the workpiece 11 is fitted via the pressure-sensitive adhesive sheet T and a pressing part for nipping the annular frame F from the upper side of the support part together with the support part, and fixing the annular frame F so that an upper face of the pressing part is located below a holding face of the chuck table 38; a grinding means 10 which rotatably supports a grinding wheel 24 grinding the workpiece 11 held by the chuck table 38; and a frame detection means 50 detecting whether or not the upper face of the pressing part is positioned below the holding face of the chuck table 38. |
