发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
摘要 <p>A semiconductor device includes a gate stack, an isolation structure and a strained feature. The gate stack is over a substrate. The isolation structure is in the substrate. The strained feature is disposed between the gate stack and the isolation structure and disposed in the substrate. The strained feature includes an upper surface adjacent to the isolation structure having a first crystal plane and a sidewall surface adjacent to the gate stack having a second crystal plane. The first crystal plane is different from the second crystal plane.</p>
申请公布号 KR101297935(B1) 申请公布日期 2013.08.19
申请号 KR20110133645 申请日期 2011.12.13
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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