| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system for classifying defects detected on a generation layer of a sample, a classification unit which can operate with the inspection system, and a computer execution method for classifying defects.SOLUTION: A classification method includes the steps of: acquiring input data relevant to detected defects; processing the input data by using determination algorithm associated with a generation layer to specify two or more classification operations and an order of them; and screening the processed defects by advance definition bins. Each bin is associated with at least one classification operation, in the at least one classification operation, at least a part of the processed defects is screened to one or more classification bins to bring the finally classified defects; and in each classification operation, at least a part of the processed defects is screened so as to be processed by one or more subsequent classification operations except the last classification operation. |
