| 摘要 |
PROBLEM TO BE SOLVED: To provide a supply device and a supply method for fluid carbon dioxide that can easily manage the flow rate in carbon dioxide in a circulation system.SOLUTION: A supply device for fluid carbon dioxide includes: a circulation system including a purification section 10 which removes impurities and contaminants from carbon dioxide, a reservoir section 12 which reserves carbon dioxide having passed through the purification section 10 in a liquid state, a supply section 13 which has a pump 25 for sending the carbon dioxide in the reservoir section 12 to a use point 200 with pressure, and a return line 28 which returns excessive carbon dioxide supplied from the supply section 13 and not used at the use point 200 toward the reservoir section 12; a carbon dioxide introduction section 11 which introduces carbon dioxide as a raw material or recovery gas into the circulation system; and a flow meter 50 which measures a flow rate of the carbon dioxide at one or more places in the circulation system. |
