| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation device and an electron beam transmission unit, capable of suppressing the degradation of a window member while ensuring the pressure resistant strength of the window member.SOLUTION: In an electron beam irradiation device including an electron gun for generating an electron beam, and a housing provided with electron beam transmission holes for making the electron beam generated by the electron gun pass through, an electron beam transmission unit 50 is disposed at an emission side opening portion of the electron beam transmission holes, and makes the electron beam passing through the electron beam transmission holes pass through. The electron beam transmission unit 50 includes: a window frame body 50A to be installed to the emission side opening portion; a supporting member 52 having a metallic mesh portion 52b disposed on the inside of the window frame body 50A; a window member 55 supported on the metallic mesh portion 52b, and making the electron beam passing through the electron transmission holes pass through; and a heat transfer member 59 disposed between the metallic mesh portion 52b and the window member 55. The heat transfer member 59 is a film made of material including carbon, and has a vent hole. |
