发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To simultaneously separate a plurality of chips, in addition, supply many types of chips, speed up chip assembly, and make a chip supply mechanism compact.SOLUTION: A method for manufacturing a semiconductor device is constituted so that a moving direction of dicing tape 2 which adheres and supports a semiconductor chip 1 and a dicing ring 3 is bent like the inverted U-shape by an edge member 4, in accordance with bending, the ring and the chip are peeled off from the tape, the peeled chip moves onto a base member 6 placed adjacent to the edge member, and then, the chip on the base member is absorbingly held by a chip assembly machine 9, and transferred to a loaded member 7 to be assembled.
申请公布号 JP2013162081(A) 申请公布日期 2013.08.19
申请号 JP20120025152 申请日期 2012.02.08
申请人 DENSO CORP 发明人 KAJINO YOICHI
分类号 H01L21/67;H01L21/301;H01L21/52 主分类号 H01L21/67
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