| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of measuring a surface shape of an object to be measured in an actual use environment with high accuracy and low cost.SOLUTION: A measuring device 1 for measuring a surface shape of an object 120 to be measured, using interference of light includes: a probe 103 for irradiating a surface of the object 120 to be measured with light 119, and scanning the surface of the object 120 to be measured in a non-contact manner; a detection part 110 for detecting light 122 from the surface of the object 120 to be measured through the probe 103; a storage part 118 which has a partition wall 118a for separating the object 120 to be measured and the probe 103, and stores the object 120 to be measured; an environment control part 150 for controlling an environment inside the storage part 118; and a calculation part 141 for obtaining the surface shape of the object 120 to be measured, using a detection result of the detection part 110 and information about the partition wall 118a. |
