| 摘要 |
PROBLEM TO BE SOLVED: To diagnose whether or not a failure is generated in a converter and a detector of a flow meter without detaching equipment.SOLUTION: A flow meter 1 includes: a detector 2 which detects rate of flow which flows in a flow channel, and outputs the detected flow rate as a sensor signal; a converter 3 having an operation part 14 which performs signal processing to the sensor signal to calculate the flow rate; a waveform generation part 17 which generates and outputs waveform of a reference signal for diagnosing the converter 3; and a diagnostic part 19 which diagnoses whether or not the converter 3 is failed based on an operation result calculated by the operation part 14 when the reference signal is input in the operation part 14. Thus, the failure is diagnosed without detaching equipment. |
