发明名称 TOOL CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a tool cutting device capable of detecting abnormality such as excessive wear or chipping, causing deterioration in processing quality of a workpiece, occurring at a cutting edge.SOLUTION: There is provided a tool cutting device including a chuck table holding a workpiece and tool cutting means having a spindle driven to rotate and a tool wheel mounted to a top of the spindle and including a cutting edge for cutting the workpiece held on the chuck table, the tool cutting device being characterized in including imaging means of imaging an upper surface of the workpiece cut by the tool cutting means to form a picked-up image, and control means having an abnormality detection part detecting abnormality of the tool cutting means on the basis of the picked-up image formed by the imaging means.
申请公布号 JP2013162000(A) 申请公布日期 2013.08.19
申请号 JP20120023758 申请日期 2012.02.07
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUDA TOMOHITO
分类号 H01L21/304;B23D5/02;B23Q17/09;B23Q17/24 主分类号 H01L21/304
代理机构 代理人
主权项
地址