| 摘要 |
PURPOSE: A laser position correction device and a method thereof are provided to implement a biosensor consisting of a fine-line width pattern with a high precision by using a laser. CONSTITUTION: A laser position correction device for manufacturing a biosensor having a fine-line width comprises a load unit (110), a laser generation unit (120), a vision unit (130), a position detect unit (140), and a control unit (150). In the load unit, an align mark is indicated on a surface, and a substrate is loaded. The laser generation unit generates the align mark and a micro-pattern in the substrate. The vision unit generates a correction coordinate according to a driving error of the laser generation unit and the align mark of the generated substrate. The position detect unit detects information of a laser beam generated from the laser generation unit. The control unit controls a laser bean power of the laser generation unit or a position of the load unit. [Reference numerals] (110) Load unit (substrate information); (121) Laser generation part; (122) Aperture part; (123) Laser enlarger; (124) X-Y scan mirror; (125) Plane lens; (140) Position detect unit; (150) Control unit; (AA) UVW stage; (BB) Magnification lens imaging system; (CC) Align imaging system; (DD) Monitoring imaging system |
