METHOD FOR MANUFACTURING CAPACITOR, CAPACITOR, AND METHOD FOR FORMING DIELECTRIC FILM USED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a capacitor capable of compatibly attaining a higher dielectric constant and a lower leakage current, a capacitor, and a method for forming a dielectric film used for such a capacitor.SOLUTION: A method for manufacturing a capacitor comprises the steps of: forming a lower electrode layer on a substrate; forming a first TiOfilm having an interface control function on the lower electrode; forming a ZrO-based film on the first TiOfilm; annealing the ZrO-based film for crystallizing ZrOof the ZrO-based film after forming the ZrO-based film; forming a second TiOfilm functioning as a capacitance film on the ZrO-based film; and forming an upper electrode layer on the second TiOfilm.