PLASMA GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma generation device capable of securing uniformity in plasma density over the large area.SOLUTION: A plasma generation device includes: a plasma generation chamber 2 in which plasma is generated; a pair of linear antennas 3a and 3b which are arranged side by side at an interval in the plasma generation chamber 2 without being grounded, and generates plasma by a discharge between both; and an ungrounded wire which is connected to the pair of linear antennas 3a and 3b and supplies electric power for discharge to the linear antenna 3a and 3b. Accordingly, uniform plasma can be generated in a length direction of the linear antennas and also plasma density in the plasma generation chamber can be made uniform over the large area by folding back and arranging the linear antennas in the plasma generation chamber because arrangement of the linear antennas is not restricted.