TRANSFER CONTAINER AND SEAL MEMBER FOR TRANSFER CONTAINER DOOR

摘要

PROBLEM TO BE SOLVED: To prevent particles or the like from entering a container during a movement when a wafer or the like is moved among respective process devices during manufacture of a semiconductor and the like, and to prevent particles from being produced owing as respective components in the container are rubbed when each manufacturing device and the container are docked together and the internal wafer or the like is transferred.SOLUTION: There is provided a transfer container including a transfer container body and a transfer container door, the transfer container having a seal structure capable of hermetically sealing the transfer container body and transfer container door by sealing connection by installing a seal member, having a section such that a channel-shaped bottom part swells circularly to both sides and also swells more into a gutter shape than to the outside, in a groove formed in the transfer container door.