发明名称 |
TARGET STRUCTURE, RADIATION GENERATOR HAVING THE SAME, AND RADIOGRAPHIC SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a target structure which has a configuration that a target is formed on a diamond substrate and which can quickly release the heat generated at the target.SOLUTION: In a target structure 8, a target layer 8b generating a radiation by irradiation with electrons is formed on a diamond substrate 8a. The largest number of crystal planes are (100) planes at least in an area on a surface of the diamond substrate 8a, in which the target layer 8b is formed. |
申请公布号 |
JP2013160637(A) |
申请公布日期 |
2013.08.19 |
申请号 |
JP20120022976 |
申请日期 |
2012.02.06 |
申请人 |
CANON INC |
发明人 |
OGURA TAKAO;TSUKAMOTO TAKEO;TAMURA MIKI;NOMURA ICHIRO |
分类号 |
G21K5/08;C23C14/14;H01J35/08;H05G1/00 |
主分类号 |
G21K5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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