发明名称 TARGET STRUCTURE, RADIATION GENERATOR HAVING THE SAME, AND RADIOGRAPHIC SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a target structure which has a configuration that a target is formed on a diamond substrate and which can quickly release the heat generated at the target.SOLUTION: In a target structure 8, a target layer 8b generating a radiation by irradiation with electrons is formed on a diamond substrate 8a. The largest number of crystal planes are (100) planes at least in an area on a surface of the diamond substrate 8a, in which the target layer 8b is formed.
申请公布号 JP2013160637(A) 申请公布日期 2013.08.19
申请号 JP20120022976 申请日期 2012.02.06
申请人 CANON INC 发明人 OGURA TAKAO;TSUKAMOTO TAKEO;TAMURA MIKI;NOMURA ICHIRO
分类号 G21K5/08;C23C14/14;H01J35/08;H05G1/00 主分类号 G21K5/08
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