| 摘要 |
PROBLEM TO BE SOLVED: To keep the inside of a substrate storage container in a state of low humidity.SOLUTION: A purge device which purges the inner part of a substrate storage container 10 comprises: an upper nozzle 2 which is provided above an opening 10a of the substrate storage container 10, and supplies a drying gas diagonally downward to an opposite side of the substrate storage container 10 and over the whole surface of the width of the opening 10a; and a plurality of side part nozzles 3 and 4 which are each provided at the sides of right and left of the opening 10a of the substrate storage container 10 and supply the drying gas toward the inner part of the substrate storage container 10 from the outside of the opening 10a. The side part nozzles 3 and 4 have lengths equal to or longer than the height of the opening 10a, and have a plurality of supply holes 6 for supplying the drying gas vertically at predetermined spaces. Each supply hole 6 formed in one side part nozzle and each supply hole 6 provided in the other side part nozzle are alternately arranged so as not to be positioned at the same height. |
