| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal measurement device that allows for alleviation of an influence on measurement of diffraction light of different orders by reflection light.SOLUTION: The confocal measurement device according to the present invention relates to a confocal measurement device measuring displacement of a measured object body using a confocal optical system. The confocal measurement device comprises: a light source that emits light of a plurality of wavelengths; a diffraction lens 1 that causes chromatic aberration along an optical axis direction in the light emitted from the light source; and a measurement section that measures intensity of light focused on a measured object body 200 for each wavelength, of the light in which the chromatic aberration is caused by the diffraction lens 1. Further, the confocal measurement device displaces a principal ray from the light source to the diffraction lens 1 with respect to the optical axis of the diffraction lens 1. |
