| 摘要 |
PROBLEM TO BE SOLVED: To increase an operating behavior of semiconductor wafer carrying members, namely, to give flexibility to semiconductor wafer carrying behavior.SOLUTION: An end effector 1 for semiconductor wafers 9 includes at least two hands 3A, 3B arrayed in the vertical direction for holding the semiconductor wafers 9 in a horizontal plane, respectively, and constructed movable, and a control device 8 for controlling the operation of the at least two hands 3A, 3B. The hands 3A, 3B have two fingers 2A, 2B each isolated from each other to hold the semiconductor wafers 9 in the horizontal plane, respectively. The fingers 2A, 2B are each constructed independently movable between a holding position for holding the semiconductor wafer 9 and a retracted position for cancelling the hold of the semiconductor wafer 9. The control device 8 is constructed to individually control the moving operation of the fingers 2A, 2B between the holding position and the retracted position. |
