| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple decomposition treatment device that can innocuously treat a process exhaust gas including Freon series persistent substances and silane system substances sent into a combustion cylinder body from a process exhaust gas induction port by combustion decomposition without attaching powder produced by combustion decomposition of the silane system substances on a wall surface.SOLUTION: A decomposition treatment device includes a combustible gas nozzle 36 which belches a combustible gas in the direction of a center axis line L1 of a combustion cylinder body 10 and a combustion supporting gas nozzle 35 positioning inside the combustible gas nozzle to belch a combustion supporting gas in a direction perpendicular to an inner periphery of the combustion cylinder body 10 like colliding. By controlling an amount of the combustion supporting gas so that the combustion gas and the combustion supporting gas flow down along an inner peripheral wall of the combustion cylinder body 10 at around a speed of 10 m/s or faster, the powder produced when the silane system substances are combusted and decomposed does not attach on a wall face but flies downstream. By setting a temperature inside the combustion cylinder body 10 at around 1,000°C or higher, the combustion decomposition of Freon series persistent substances also progresses. |
