A SYSTEM, A METHOD AND A COMPUTER PROGRAM PRODUCT FOR CAD-BASED REGISTRATION

摘要

PURPOSE: System, method and computer program product for computer aided design (CAD) based registration are provided to generate examined results by detecting detects in a region examined with help of target run-time displacements and reacting with the detects. CONSTITUTION: A first input interface obtains a target database including correction information including displacements of frames included in a wafer region of a reference wafer, location information and target image of targets of the frames. A second input interface obtains scanned image data of an examined region of an examined wafer. A correlator (260) defines a search window of targets of the database based on a displacement of frame including the target and calculates a run-time displacement with respect to the targets based on correlation of a target image of a target for a part of scanned image region defined by the corresponding search window. [Reference numerals] (100) Wafer; (210) Displacement analysis module; (220) Post-processing module; (230) Sensor; (232) Movable stage; (234) Recipe database; (236) Line module; (238) Recipe interface; (240) Data storage unit; (250) Image processing module; (290) Processor; (295) Output interface; (AA) Images of targets; (BB) Displacement information; (CC) Scanned image data