发明名称 3-dimensional non-volatile memory device and method of fabricating the same
摘要 PURPOSE: A 3D nonvolatile memory device and a manufacturing method thereof are provided to supply the 3D nonvolatile memory device with high integration by preventing crosstalk between adjacent memory cells without combining a rectifying device. CONSTITUTION: A wiring stack(ST) includes a conductive line which is vertically laminated on a substrate(10). A data storage layer(SL) is formed on the sidewall of the wiring stack. The data storage layer includes a first data storage layer(SL1) and a second data storage layer(SL2) to face each other. A channel layer(CH) is extended cross conductive lines. A gate electrode(GE) is formed on a gate insulation layer(GI) in contact with the channel layer.
申请公布号 KR101297088(B1) 申请公布日期 2013.08.16
申请号 KR20110061665 申请日期 2011.06.24
申请人 发明人
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
代理机构 代理人
主权项
地址