发明名称 MANUFACTURING METHOD OF SUPERSONIC THICKNESS SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a supersonic thickness measuring sensor which is thin and has flexibility as a supersonic thickness sensor, can follow a measurement object surface even if the measurement object surface is curved, enables being always be pasted to a measurement object place, eliminates various work after measuring thickness, greatly reduces time and laber for measuring thickness, and can simultaneously measure the thickness of a large number of places or continuously measure thickness.SOLUTION: Powders of an oxide-based piezoelectric material which is a raw material of a ceramic piezoelectric body are mixed with a low-melting point glass forming material including glass forming oxide to prepare a paste-like sintering raw material. The paste of the mixture is applied on a surface of a thin metallic plate which should be one electrode, heated, and sintered to form a thin sintering layer which is comparatively porous and can indicate flexibility, on the metallic thin plate surface. Then, the installation of the other electrode and polarization are carried out, and flexibility can be indicated as a whole of the sensor.
申请公布号 JP2013157479(A) 申请公布日期 2013.08.15
申请号 JP20120017247 申请日期 2012.01.30
申请人 MITSUBISHI HEAVY IND LTD 发明人 MORI KAZUTAKA;KUDO DAISUKE;YAMAMOTO YUKO;UEMOTO AKIHIRO;KAWANAMI SEIICHI
分类号 H01L41/22;G01B17/02;H01L41/08;H01L41/187;H01L41/257;H01L41/39 主分类号 H01L41/22
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