FILM FORMATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a film formation device which prevents particles from adhering to a work-piece even if the particles occur in dispersion nozzles etc.SOLUTION: A film formation device forming a thin film on a surface of a work-piece W includes: a processing container 4; holding means 12 for holding multiple work-pieces between a top plate 13A and a bottom plate 13B; heating means 94 for heating the work-piece; material gas supply means 30 having a dispersion nozzle 40 where multiple gas jet holes 30A are formed; reaction gas supply means 28 having a dispersion nozzle 38 where multiple gas jet holes 38A are formed; and a device control part 96 controlling the operation of the entire apparatus. A particle emission hole 60 is provided at an upper part of at least one of the dispersion nozzles which is located at a higher position than a work-piece holding region 15 of the holding means.