发明名称 MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP
摘要 A refrigerator system or cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The refrigerator system or cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators.
申请公布号 US2013205805(A1) 申请公布日期 2013.08.15
申请号 US201313753093 申请日期 2013.01.29
申请人 BROOKS AUTOMATION, INC.;BROOKS AUTOMATION, INC. 发明人 BARTLETT ALLEN J.;EACOBACCI, JR. MICHAEL J.;SYSSOEV SERGEI
分类号 B01D8/00 主分类号 B01D8/00
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