| 摘要 |
A control valve for a fluidic system is disclosed. The control valve comprises a housing and a flow control membrane is disclosed. The flow control membrane is anchored within the housing to form a reference chamber on a first side of the membrane and a fluid flow channel on a second opposing side of the membrane. The fluid flow channel selectively opens and closes to permit fluid to flow from the inlet to the outlet, and the membrane is configured to control flow through the channel from the inlet to the outlet by deflecting in response to pressure differentials of the reference chamber pressure and the fluid flow channel pressure acting across the membrane.
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