发明名称 ELECTRONIC DEVICE TESTING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide an electronic device testing system that can reduce the space occupied by the system and prevent a test circuit board from working wrongly by discharging heat staying in the housing bodies of testing apparatuses arrayed in parallel longitudinally and laterally.SOLUTION: A plurality of testing apparatuses 1 that test the electric functions of a test object electronic device W by applying thermal stresses are arrayed in parallel longitudinally and laterally. Each of the testing apparatuses 1 is provided with a housing body for accommodating a test circuit board for testing the electric characteristics of the test object electronic device W. The housing bodies are separated from one another by a test chamber 11b, in which the test object electronic device W is tested, and circuit board chambers 11a that accommodate the test circuit board. And the circuit board chamber 11a of each of the plurality of testing apparatuses 1 is provided with an inlet for letting coolant gas into the circuit board chamber 11a and an exhaust outlet for discharging the coolant gas having flowed inside the circuit board chamber 11a.
申请公布号 JP2013156084(A) 申请公布日期 2013.08.15
申请号 JP20120015721 申请日期 2012.01.27
申请人 TOKYO ELECTRON LTD 发明人 OKUBO MAMORU
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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