发明名称 |
DIMENSIONAL SILICA-BASED POROUS SILICON STRUCTURES AND METHODS OF FABRICATION |
摘要 |
Methods of fabricating dimensional silica-based substrates or structures comprising a porous silicon layers are contemplated. According to one embodiment, oxygen is extracted from the atomic elemental composition of a silica glass substrate by reacting a metallic gas with the substrate in a heated inert atmosphere to form a metal-oxygen complex along a surface of the substrate. The metal-oxygen complex is removed from the surface of the silica glass substrate to yield a crystalline porous silicon surface portion and one or more additional layers are formed over the crystalline porous silicon surface portion of the silica glass substrate to yield a dimensional silica-based substrate or structure comprising the porous silicon layer. Embodiments are also contemplated where the substrate is glass-based, but is not necessarily a silica-based glass substrate. Additional embodiments are disclosed and claimed.
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申请公布号 |
US2013209781(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
US201313847740 |
申请日期 |
2013.03.20 |
申请人 |
BELLMAN ROBERT ALAN;BORRELLI NICHOLAS FRANCIS;DENEKA DAVID ALAN;O'MALLEY SHAWN MICHAEL;SCHNEIDER VITOR MARINO |
发明人 |
BELLMAN ROBERT ALAN;BORRELLI NICHOLAS FRANCIS;DENEKA DAVID ALAN;O'MALLEY SHAWN MICHAEL;SCHNEIDER VITOR MARINO |
分类号 |
C03C23/00;H01L21/322 |
主分类号 |
C03C23/00 |
代理机构 |
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代理人 |
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地址 |
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