| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing system in which parameter management is possible.SOLUTION: A drawing system 100 includes control units 122, 124, 126 of different protocols, a drawing device 110 which draws a pattern on a sample by using an electron beam 200, a database 140 which stores parameter information received from an external slave computer, an interface circuit group 139 which outputs the parameter information thus received to the control units 122, 124, 126 according to the protocols, a master computer 160, and an I/F circuit group 170 which receives a request from the master computer 160 and transmits the parameter information, set in the control units 122, 124, 126 without going through the database 140, while converting to conform with a protocol used by the master computer 160. According to the invention, drawing not assumed can be avoided. |
