发明名称 OPTICAL FILTER DEVICE AND MANUFACTURING METHOD FOR THE OPTICAL FILTER DEVICE
摘要 An optical filter device includes an interference filter and a housing. The interference filter includes a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflective film provided on the fixed substrate, and a movable reflective film provided on the movable substrate and opposed to the fixed reflective film across an inter-reflective film gap. The housing includes a base substrate on which the interference filter is arranged. A fixing member is arranged between the movable substrate and the base substrate. The movable substrate is fixed to the base substrate by the fixing member in one place excluding a region where the movable reflective film is provided.
申请公布号 US2013208359(A1) 申请公布日期 2013.08.15
申请号 US201313766122 申请日期 2013.02.13
申请人 SEIKO EPSON CORPORATION;SEIKO EPSON CORPORATION 发明人 MATSUNO YASUSHI;SANO AKIRA
分类号 G02B5/28;G02B26/00 主分类号 G02B5/28
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