| 发明名称 |
WAFER INVERSION MECHANISM |
| 摘要 |
A BOLTS compatible module includes a support mechanism for gripping a wafer. The support mechanism is coupled to a rotary mechanism for rotating the support mechanism with a wafer grip therein. The rotary mechanism is coupled to the module and capable of at least 180° of rotation.
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| 申请公布号 |
US2013209211(A1) |
申请公布日期 |
2013.08.15 |
| 申请号 |
US201213723618 |
申请日期 |
2012.12.21 |
| 申请人 |
RUDOLPH TECHNOLOGIES, INC.;RUDOLPH TECHNOLOGIES, INC. |
发明人 |
PALM TROY |
| 分类号 |
H01L21/68;B25J15/00 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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