A radiation sensor is provided. The radiation sensor includes a substrate; a diaphragm positioned over the substrate; an absorbing layer which is configured to absorb infrared radiation; a supporting element arranged between the absorbing layer and the diaphragm such that a spacing gap is formed between the absorbing layer and the diaphragm; wherein the size of the spacing gap is in a range of about 3.6 micrometer to about 100 micrometer.
申请公布号
US2013206989(A1)
申请公布日期
2013.08.15
申请号
US201313756973
申请日期
2013.02.01
申请人
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
发明人
ZHOU HUCHUAN;KROPELNICKI PIOTR;TSAI JULIUS MING LIN