| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control device capable of accurately controlling a flow in a wide temperature range, by using a resin housing excellent in chemical resistance.SOLUTION: A flow control device includes: a resin housing 10b; a diaphragm 35 supported in the housing 10b so as to split the housing 10b inside into a gas chamber side 28 for introducing gas and a fluid chamber side 29 through which fluid passes, and being activated by a differential pressure between the gas chamber side 28 and the fluid chamber side 29; and a valve element 31 which operates in integration with the diaphragm 35 to control the flow of the fluid introduced into the fluid chamber side 29. The gas chamber side 28 has a holding member 41 for holding the diaphragm 35 between an opposed surface 40a of the fluid chamber side 29 opposed to the diaphragm 35 and itself, and the holding member 41 is screwed to an inner peripheral wall of the gas chamber side 28 via a screw part 53. |
