| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer mechanism, a substrate positioning device and a robot capable of transferring the rotation of a driving source, regardless of the use of a belt having period characteristics with a variable pitch of teeth, at a high degree of accuracy with variation smaller than the pitch variation.SOLUTION: A transfer mechanism is configured to have a drive-side pulley, a driven-side pulley and a belt. The drive-side pulley is provided on a drive shaft and has outer teeth at a predetermined pitch. The driven-side pulley is provided on a driven shaft and has outer teeth at the predetermined pitch. The belt has inner teeth, at the predetermined pitch, which mesh with the outer teeth of the drive-side pulley and the driven-side pulley. Further, the belt is made up of a plurality of sub-belts having period characteristics in which the pitch varies with a predetermined period. The sub-belts are disposed in such a manner that the phases of the period characteristics are shifted from one another. |
