发明名称 |
METHOD FOR TREATING INNER SURFACE OF CHLORINE TRIFLUORIDE SUPPLY PATH IN DEVICE USING CHLORINE TRIFLUORIDE |
摘要 |
Provided is a method for treating the inner surface of a chlorine trifluoride supply path that enables reliable suppression of drops in the concentration of ClF3 in a reaction chamber during treatment work. A gas supply path (2) and a gas discharge path (3) are integrally connected to a treatment chamber (1) of a treatment device in which chlorine trifluoride is used as an etching gas. Chlorine trifluoride gas with a concentration equal to or greater than the concentration of the chlorine trifluoride gas supplied during etching treatment operation is allowed to act on the inner surfaces of at least the treatment chamber (1) and the gas supply path (2) from among the treatment chamber (1), the gas supply path (2), and the gas discharge path (3), thus coating the inner surfaces of at least the treatment chamber (1) and the gas supply path (2) with a fluoride film. |
申请公布号 |
WO2013118260(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
WO2012JP52862 |
申请日期 |
2012.02.08 |
申请人 |
IWATANI CORPORATION;YOSHINO YU;KOIKE KUNIHIKO;SAEDA MANABU;MANABE TOSHIKI |
发明人 |
YOSHINO YU;KOIKE KUNIHIKO;SAEDA MANABU;MANABE TOSHIKI |
分类号 |
H01L21/3065;H01L21/205 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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