| 摘要 |
PROBLEM TO BE SOLVED: To provide a presumably defective portion determination apparatus which can determine a presumably defective portion in consideration of not only the value of a level difference but the shape of the level difference.SOLUTION: A level difference included in level difference data which indicates a level difference distribution on the surface of a semiconductor device is divided into two or more unit level differences in the depth direction. For each of the unit level differences obtained by the division, a relationship between the height of a contour line at a level difference position of an upper face and the area of an opening surrounded by the contour line is determined to determine the presence or absence of a presumably defective portion. For example, for each of the unit level differences obtained by the division of the level difference, the height from the deepest portion of the level difference of a contour line at the level difference position of the upper face and the area of an opening surrounded by the contour line are applied to a conditional expression, and the presence or absence of a presumably defective portion is determined based on whether or not the conditional expression is satisfied. |
