发明名称 |
Block copolymer and methods relating thereto |
摘要 |
A copolymer composition including a block copolymer having a poly(methyl methacrylate) block and a poly((trimethylsilyl)methyl methacrylate) block is provided; wherein the block copolymer exhibits a number average molecular weight, MN, of 1 to 1,000 kg/mol; and, wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2. Also provided are substrates treated with the copolymer composition.
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申请公布号 |
US2013209693(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
US201213370588 |
申请日期 |
2012.02.10 |
申请人 |
VOGEL ERIN B.;GINZBURG VALERIY V.;CHANG SHIH-WEI;MURRAY DANIEL J.;HUSTAD PHILLIP D.;TREFONAS PETER;ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
VOGEL ERIN B.;GINZBURG VALERIY V.;CHANG SHIH-WEI;MURRAY DANIEL J.;HUSTAD PHILLIP D.;TREFONAS PETER |
分类号 |
C08F293/00;B05D3/02;C08K5/01 |
主分类号 |
C08F293/00 |
代理机构 |
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