PATTERN EVALUATION METHOD AND PATTERN EVALUATION DEVICE

摘要

Provided is a pattern evaluation method, comprising: a step of estimating an allowed image capture misalignment for evaluating an overlap location in one or a plurality of evaluation point candidates on the basis of layout information of a pattern; a step of establishing one or a plurality of evaluation points from among the evaluation point candidates on the basis of the allowed image capture misalignment; a step of establishing an image capture sequence for image capturing the selected evaluation points; and a step of evaluating the overlap location of a first pattern and a second pattern from an image which is obtained by image capturing the evaluation points according to the image capture sequence.