发明名称 |
APPARATUS AND METHOD FOR PRODUCING SOLAR CELLS |
摘要 |
A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source. |
申请公布号 |
US2013210190(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
US201213486079 |
申请日期 |
2012.06.01 |
申请人 |
TENG EDWARD;CHAO YING-CHEN;YANG CHIH-JEN;HSIAO KUO-JUI;TSMC SOLAR, LTD. |
发明人 |
TENG EDWARD;CHAO YING-CHEN;YANG CHIH-JEN;HSIAO KUO-JUI |
分类号 |
H01L31/18;C23C14/34 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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