发明名称 CORDIERITE SINTERED COMPACT, AND MEMBER FOR EXPOSURE DEVICE COMPRISING THE CORDIERITE SINTERED COMPACT
摘要 PROBLEM TO BE SOLVED: To provide a cordierite sintered compact having a small size change at a temperature of &ge;100°C, and to provide a member for an exposure device comprising the cordierite sintered compact.SOLUTION: A cordierite sintered compact has orthorhombic cordierite as a main crystal, includes anorthite as a secondary crystal, and has a porosity of <0.5%. In the cordierite sintered compact containing &ge;5.5 to &le;7.5 mass% Mg, in terms of MgO, and &ge;8.3 to &le;11.0 mass% Ca, in terms of CaO, with respect to the 100 mass% whole component amount constituting the cordierite sintered compact, the intensity ratio I/Ibetween the peak I(2&thetas;=29.0°-30.0°) of the cordierite and the peak I(2&thetas;=27.5°-28.5°) of the anorthite measured by an X-ray diffractometer using K&alpha;-rays of Cu satisfies a range of 0.53-1.2.
申请公布号 JP2013155078(A) 申请公布日期 2013.08.15
申请号 JP20120016740 申请日期 2012.01.30
申请人 KYOCERA CORP 发明人 SENO HIROAKI
分类号 C04B35/195;G03F7/20;H01L21/027 主分类号 C04B35/195
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