| 摘要 |
PROBLEM TO BE SOLVED: To provide an absorbing anti-reflective coating composition comprising a crosslinkable polymer, a polymeric crosslinking agent and a thermal acid generator, and a method for forming an image by using the anti-reflective coating composition.SOLUTION: The anti-reflective coating composition comprises: (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and (iii) a polymeric crosslinking agent comprising at least one unit of structure (6), where in the formula R-Rare independently selected from H, (C-C) alkyl and aromatic group, Rand Rare independently (C-C) alkyl. |
