| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamination apparatus which can reduce defect and warpage of a laminated sheet after lamination.SOLUTION: In a lamination apparatus which laminates a plate-like member 2 with a flexible plate 3, it is provided with an upper table 20 which adsorbs the plate-like member 2, a lower table 40 which is located below the upper table 20 and on which the flexible plate 3 is mounted, a rotating roller 50 which comes into contact with the lower surface of the flexible plate 3 supported by the lower table 40 and causes the flexible plate 3 to deflect by its own weight, a press part 60 which presses the flexible plate 3 against the plate-like member 2 adsorbed by the upper table 20 through the rotating roller 50, and a movement mechanism 70 which moves the rotating roller 50 and the press part 60 relatively in relation to the upper table 20. |
