FACILITATING ADHESION BETWEEN SUBSTRATE AND PATTERNED LAYER

摘要

SYSTEMS AND METHODS FOR ADHERING A SUBSTRATE (12) TO A PATTERNED LAYER (46) ARE DESCRIBED. INCLUDED ARE IN SITU CLEANING AND CONDITIONING OF THE SUBSTRATE, AND THE APPLICATION OF AN ADHESION LAYER (60) BETWEEN THE SUBSTRATE AND THE PATTERNED LAYER, AS WELL AS FORMING AN INTERMEDIATE LAYER (100) BETWEEN ADHESION MATERIALS AND THE SUBSTRATE.