MICROMECHANICAL SOLID-ELECTROLYTE SENSOR DEVICE AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To realize miniaturization of solid-electrolyte gas sensors, reduce cost of manufacturing other gas sensors and enable integration of electronic circuits.SOLUTION: A micromechanical solid-electrolyte sensor device includes: a micromechanical carrier substrate (1; 1a; 1b); a first porous electrode (E1, E1', E1'') and a second porous electrode (E2; E2', E2''); and a solid-electrolyte (5) embedded between the first porous electrode (E1, E1', E1'') and the second porous electrode (E2; E2', E2'').