THIN FILM FORMING APPARATUS, THIN FILM FORMING METHOD, ELECTRO-MECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTING HEAD, AND INKJET RECORDING APPARATUS

摘要

PROBLEM TO BE SOLVED: To form a desired functional thin film.SOLUTION: A thin film forming apparatus for forming a functional thin film which is crystallized from a precursor layer on an electrode layer formed on a substrate includes: a water-repellant film forming unit which forms a water-repellant film constituted of a self-assembled monomolecular on the electrode layer other than a region where the functional thin film is formed; an inkjet applying unit which applies the precursor layer by an inkjet method on the region where the functional thin film is formed on the electrode layer; and a controller which controls the time from when the water-repellant film is formed by the water-repellant film forming unit till when the precursor layer is applied by the inkjet applying unit, to be within a predetermined time.