发明名称 LASER DEVICE, EXPOSURE DEVICE AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser device capable of improving a rising characteristic of power of conversion pulse light output with a wavelength converted by a wavelength conversion optical element.SOLUTION: The laser device comprises: a first light source part I for outputting first pulse light Lp; a second light source part II for outputting second pulse light Lp; a third light source part III for outputting third pulse light Lp; a wavelength conversion optical element 36 on which the first, second and third pulse light are incident in an overlapping way with each other; and a control part 8. The wavelength conversion optical element 36 generates first conversion pulse light Lvwhen the first pulse light Lpand the second pulse light Lpare incident in the overlapping way with each other, and generates second conversion pulse light Lvwhen the first pulse light Lpand the third pulse light Lpare incident in the overlapping way with each other. The control part 8 switches over to any one of a first state allowing the first pulse light Lpand the second pulse light Lpto be overlapped with each other and a second state allowing the first pulse light Lpand the third pulse light Lpto be overlapped with each other in the wavelength conversion optical element 36.
申请公布号 JP2013156448(A) 申请公布日期 2013.08.15
申请号 JP20120017078 申请日期 2012.01.30
申请人 NIKON CORP 发明人 OSHITA YOSHIAKI
分类号 G02F1/37;G03F7/20;H01L21/027 主分类号 G02F1/37
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