| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp with excellent startability which has a constitution where a pair of electrodes are arranged in an arc tube.SOLUTION: An excimer lamp has a first electrode and a second electrode housed in an arc tube filled with gas for emission. The excimer lamp includes a cylindrical tube made of a dielectric material which is arranged in the arc tube to extend in an arc tube axis direction. The first electrode is arranged in the cylindrical tube to extend in a cylindrical tube axis direction, and the second electrode is arranged to extend along a cylindrical tube axis. At least part of the second electrode comes into close contact with an external surface of the cylindrical tube. In the close-contact region, the first electrode and the second electrode face each other, at least at one position, across a tube wall of the cylindrical tube. |
