发明名称 |
METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT, AND RADIO-CONTROLLED CLOCK |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibration piece, a piezoelectric vibration piece, a piezoelectric vibrator, an oscillator, electronic equipment, and a radio-controlled clock, capable of suppressing occurrence of a defective product.SOLUTION: A method for manufacturing a piezoelectric vibration piece comprises the steps of: forming a plurality of piezoelectric plates 24 so that each of the piezoelectric plates is coupled to a wafer S composed of a piezoelectric material via a coupling part 42; and dicing the plurality of piezoelectric plates 24 into individual pieces. This method forms a honeycomb structure 82 for blocking progress of a crack which occurs on the wafer S at a position apart from the region in which the piezoelectric plates of the wafer S are formed at least before the step of dicing the plurality of piezoelectric plates into individual pieces. |
申请公布号 |
JP2013157910(A) |
申请公布日期 |
2013.08.15 |
申请号 |
JP20120018666 |
申请日期 |
2012.01.31 |
申请人 |
SEIKO INSTRUMENTS INC |
发明人 |
IROKAWA TAIKI |
分类号 |
H03H3/02;H01L41/09;H01L41/18;H01L41/22;H03B5/32;H03H9/02;H03H9/19;H03H9/215 |
主分类号 |
H03H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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