发明名称 METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT, AND RADIO-CONTROLLED CLOCK
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibration piece, a piezoelectric vibration piece, a piezoelectric vibrator, an oscillator, electronic equipment, and a radio-controlled clock, capable of suppressing occurrence of a defective product.SOLUTION: A method for manufacturing a piezoelectric vibration piece comprises the steps of: forming a plurality of piezoelectric plates 24 so that each of the piezoelectric plates is coupled to a wafer S composed of a piezoelectric material via a coupling part 42; and dicing the plurality of piezoelectric plates 24 into individual pieces. This method forms a honeycomb structure 82 for blocking progress of a crack which occurs on the wafer S at a position apart from the region in which the piezoelectric plates of the wafer S are formed at least before the step of dicing the plurality of piezoelectric plates into individual pieces.
申请公布号 JP2013157910(A) 申请公布日期 2013.08.15
申请号 JP20120018666 申请日期 2012.01.31
申请人 SEIKO INSTRUMENTS INC 发明人 IROKAWA TAIKI
分类号 H03H3/02;H01L41/09;H01L41/18;H01L41/22;H03B5/32;H03H9/02;H03H9/19;H03H9/215 主分类号 H03H3/02
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