发明名称 |
INFRARED SENSOR COMPRISING TUNNEL JUNCTION FOR MEASURING THE DEFORMATION OF A MEMBRANE |
摘要 |
A sensor array for measuring the deformation of an area caused by a force, comprises a first strip and a second strip arranged in the same plane on the area so as to form a tunnel junction of which at least the first strip is movably arranged on the area so that the gap between the two strips is increased when the area is deformed as a result of the action of the force.
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申请公布号 |
US2013205919(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
US201113807121 |
申请日期 |
2011.07.19 |
申请人 |
BOUSACK HERBERT;SOLTNER HELMUT;MAYER DIRK;BANZET MARKO |
发明人 |
BOUSACK HERBERT;SOLTNER HELMUT;MAYER DIRK;BANZET MARKO |
分类号 |
G01N21/84 |
主分类号 |
G01N21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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